Improvement of a micromanipulation system by using a functional surface with a groove structure

Abstract

The demand for micro parts like a micro electron mechanical system has increased in recent times. With that, the improvement in the functions of micromanipulation equipment operating the minute object is required. Physical phenomena at the microscale differ from those of the normal scale due to the “scale effect”. In micromanipulation task, when the grasped object is placed at an arbitrary position, the natural fall of the object by gravity cannot be expected. This is because it is difficult to arrange an object at an arbitrary position. In this study, a method to place an object at an arbitrary position by generating a force between the floor and the object is proposed. The floor of functional surface has a fine groove into which enough liquid is injected to generate a liquid bridging force between the floor surface and a small object. The width of the groove can is reduced by applying an area load to the floor which generates a liquid cross-linking force corresponding to the size of the object. As the grooves become finer, the capillary phenomenon occurs. Therefore, the liquid can be supplied to the groove regardless of the attitude of the floor surface. By using the proposed floor surface, the speed and stability of the work in which the object in the micro manipulation work is placed on the floor surface is improved, and contributes to the development of the micro manipulation function.