THE EFFECT OF ANNEALING TEMPERATURE ON PROPERTIES OF PZT CERAMIC FILMS PREPARED VIA SPIN-COATING PROCESS

Authors

  • Marut Khieokae Lecturer, Department of Industrial Technology, Faculty of Technical Education, Rajamangala University of Technology Krungthep, 2 Nang linchi Road, Tungmahamek, Sathon, Bangkok 10120
  • Kanut Jinpak Lecturer, Department of Industrial Technology, Faculty of Technical Education, Rajamangala University of Technology Krungthep, 2 Nang linchi Road, Tungmahamek, Sathon, Bangkok 10120
  • Suphattra Kritwattanakorn Lecturer, Department of Industrial Technology, Faculty of Technical Education, Rajamangala University of Technology Krungthep, 2 Nang linchi Road, Tungmahamek, Sathon, Bangkok 10120
  • Suwimol Jairtalawanich Lecturer, Department of Industrial Technology, Faculty of Technical Education, Rajamangala University of Technology Krungthep, 2 Nang linchi Road, Tungmahamek, Sathon, Bangkok 10120
  • Tinno Kwandee Lecturer, Department of Industrial Technology, Faculty of Technical Education, Rajamangala University of Technology Krungthep, 2 Nang linchi Road, Tungmahamek, Sathon, Bangkok 10120
  • Pichitchai Butnoi Lecturer, Department of Industrial Technology, Faculty of Technical Education, Rajamangala University of Technology Krungthep, 2 Nang linchi Road, Tungmahamek, Sathon, Bangkok 10120

Keywords:

PZT ceramic films, Spin-coating, annealing temperature, AFM

Abstract

In this work, lead zirconate titanate Pb(Zr0.52Ti0.48)O3 or PZT films under 20% mol of Pb-excess were fabricated on Ti/SiO2/Si wafer by spin-coating method. The PZT films were annealed at different temperatures of 550, 600 and 650 ̊C for 30 min under atmosphere. The effects of annealing temperature on microstructure, surface morphology and phase formation of PZT ceramic films were investigated by Field-emission scanning electron microscope (FE-SEM), Atomic force microscopy (AFM) and X-ray diffraction (XRD), respectively. The PZT ceramic films exhibited perovskite phase that crystallographic orientations increased with increasing annealing temperatures. Moreover, the average grain sizes and film thickness slightly increased with increasing annealing temperatures.

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Published

2023-04-29

Issue

Vol. 13 No. 1 (2023): January-April (2566)

Section

บทความวิจัย (Research Article)

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