The High Capacitance for Electrode Structure of Interdigital Capacitor Thin Film Models
Abstract
Abstract: This manuscript presents the outcomes of a study to determine the capacitance and electrical properties of interdigital capacitors (IDCs) thin film in 3 models. Three models of IDCs thin film were designed and fabricated on standard FR-4 PCB board using dc magnetron sputtering. The three IDCs thin film models have the same electrode material, the number of electrodes, the length, and the width of electrode but differ in electrode structure. The electrode material is silver (Ag). The capacitance, resistance, impedance, and conductance of IDCs thin films were measured and analyzed by LCR-6100 at room temperature. The electrode structure has a significant effect on the electrical properties of IDCs thin films. The new models of IDCs thin film, model 2 and model 3, show high capacitance in the range frequency of 1 – 100 kHz compare with general IDCs.
Keywords: Electrode thin film, DC magnetron sputtering, Electrical properties, Interdigital capacitors
References
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[2] R. Igreja and C. J. Dias, “Extension to the analytical model of the interdigital electrodes capacitance for a multi-layered structure,” Sens. Actuators Phys., vol. 172, no. 2, pp. 392–399, Dec. 2011.
[3] N. Angkawisittpan and T. Manasri, “Determination of Sugar Content in Sugar Solutions using Interdigital Capacitor Sensor,” Meas. Sci. Rev., vol. 12, no. 1, pp. 8–13, 2012.
[4] K. Chetpattananondh, T. Tapoanoi, P. Phukpattaranont, and N. Jindapetch, “A self-calibration water level measurement using an interdigital capacitive sensor,” Sens. Actuators Phys., vol. 209, pp. 175–182, Mar. 2014.
[5] A. Vuković Rukavina, “Hand-held unit for liquid-type recognition, based on interdigital capacitor,” Measurement, vol. 51, pp. 289–296, May 2014.
[6] S. Ren, S. Jiang, H. Liu, W. Zhang, and Y. Li, “Investigation of strain gauges based on interdigitated Ba0.5Sr0.5TiO3 thin film capacitors,” Sens. Actuators Phys., vol. 236, pp. 159–163, Dec. 2015.
[7] M. Urbiztondo, I. Pellejero, A. Rodriguez, M. P. Pina, and J. Santamaria, “Zeolite-coated interdigital capacitors for humidity sensing,” Sens. Actuators B Chem., vol. 157, no. 2, pp. 450–459, Oct. 2011.
[8] A. R. Mohd Syaifudin, K. P. Jayasundera, and S. C. Mukhopadhyay, “A low cost novel sensing system for detection of dangerous marine biotoxins in seafood,” Sens. Actuators B Chem., vol. 137, no. 1, pp. 67–75, Mar. 2009.
[9] F. Bibi, C. Guillaume, B. Sorli, and N. Gontard, “Plant polymer as sensing material: Exploring environmental sensitivity of dielectric properties using interdigital capacitors at ultra high frequency,” Sens. Actuators B Chem., vol. 230, pp. 212–222, Jul. 2016.
[10] “Ag(Ta,Nb)O3 thin-film interdigital capacitors for microwave applications,” Microelectron. J., vol. 38, no. 2, pp. 222–226, Feb. 2007.
[11] N. J. Kidner, A. Meier, Z. J. Homrighaus, B. W. Wessels, T. O. Mason, and E. J. Garboczi, “Complex electrical (impedance/dielectric) properties of electroceramic thin films by impedance spectroscopy with interdigital electrodes,” Thin Solid Films, vol. 515, no. 11, pp. 4588–4595, Apr. 2007.
[12] “Improving the measurement sensitivity of interdigital dielectric capacitors (IDC) by optimizing the dielectric property of the homogeneous passivation layer - ScienceDirect.” [Online]. Available: https://www.sciencedirect.com/science/article/pii/S0925400511010999. [Accessed: 28-Apr-2018].
[13] N. J. Kidner, Z. J. Homrighaus, T. O. Mason, and E. J. Garboczi, “Modeling interdigital electrode structures for the dielectric characterization of electroceramic thin films,” Thin Solid Films, vol. 496, no. 2, pp. 539–545, Feb. 2006.
[14] A. Vora–ud, S. Thaowonkaew, M. Rittiruam, M. Horprathum, and T. Seetawan, “Affected annealing time treatment on preferred orientation and thermoelectric properties of h–GeSbTe0.5 alloy thin film,” Curr. Appl. Phys., vol. 16, no. 3, pp. 305–310, Mar. 2016.
[15] R. Entikaria Rachmanita, M. Suweni Muntini, S. Thawankaew, W. Chao-Moo, A. Vora-Ud, and T. Seetawan, “Fabrication and characterization of interdigital capacitors thin film by DC magnetron sputtering for measuring the permittivity of crude oil,” Mater. Today Proc., vol. 5, no. 7, Part 1, pp. 15192–15197, Jan. 2018.
[16] J. Li, J. P. Longtin, S. Tankiewicz, A. Gouldstone, and S. Sampath, “Interdigital capacitive strain gauges fabricated by direct-write thermal spray and ultrafast laser micromachining,” Sens. Actuators Phys., vol. 133, no. 1, pp. 1–8, Jan. 2007.
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Published
2019-04-29
How to Cite
Rachmanita, R. E. (2019). The High Capacitance for Electrode Structure of Interdigital Capacitor Thin Film Models. Creative Science, 11(2), 55–63. Retrieved from https://ph01.tci-thaijo.org/index.php/snru_journal/article/view/171622
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