MEMS and Microsystems

Abstract

Microelectromechanical Systems (MEMS) and Microsystems are the integration of mechanical elements, sensors, actuators, and electronics on a common silicon substrate to form small structures with dimensions in the micrometer scale (one millionth of a meter) through microfabrication technology. Microsensors and Microactuators are the two main categories of MEMS. Microsensors are defined as devices that convert one form of energy into another and provide the user with a usahle energy output such in response to a specific measurable input. One such an example is to convert the energy that required to deflect the thin diaphragm in a pressure sensor into an electrical energy output. Microactuators are devices designed for moving or controlling microelements by principal means of thermal forces, shape memory alloys, piezoelectric crystals and electrostatic forces. Microgrippers, for example, can function by using electrostatic forces generated in parallel charged plates to grip the objects. MEMS can include mechanisms, such as motors, links and optical and electrical components, such as switches, all on a single silicon chip using microelectronics and micromachining technologies. MEMS advantages, compared to other methods of design and fabrication, are design simplicity, cost reduction, high performance, microscale sizes. Today, high volume MEMS can be found on diverse systems ranging across defense, medical electronic, wireless communication and automotive applications.