The relation of air borne particles and activities in clean room

Abstract

Contamination of air borne particles is a serious problem in hardisk drive industries because itrelates to a quality assurance and an acceptance of client. In this study, the relation of air borneparticles and activities in clean room was investigated. The ultimate purpose of this research was toreduce the contamination of air borne particles in the clean room. The result revealed that amounts ofparticles in atmosphere inside the clean room were acceptable values. It implied that air flow system,filtration system and the particle reduction procedure from staff were effective. While the particleswere found intermittently at the specified machines, the way to solve these problems depended n thecharacteristics of particle generated.