The Effects of Heat Treatment of ITO Thin Films Using in ITO/n-Si/ITO Photodetectors

Authors

  • สุรศักดิ์ เนียมเจริญ

Keywords:

Metal-semiconductor-metal;, ITO thin film;, Planar optical device;, Transparent electrode;, Heat treatment

Abstract

This paper reported the improvement of the electrical and optical properties of ITO/n-Si/ITO photodetec-tors. The indium tin oxide (ITO) thin films as transparent electrodes were deposited by radio frequency (RF) sputtering. The experimental results showed that the properties of ITO/n-Si/ITO photodetectors became better properties after ITO thin films were given by 300 oC heat treatment for 15 minute, in N2 atmosphere convection furnace. The dark current density and capacitance decreased by 33% and 32%, respectively. While, the photocurrent and cutoff frequency of alternating current (ac) optical response increased by 40% and 1.3 times, respectively.

References

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Published

2020-06-15

How to Cite

[1]
เนียมเจริญ ส. . ., “The Effects of Heat Treatment of ITO Thin Films Using in ITO/n-Si/ITO Photodetectors”, Eng. & Technol. Horiz., vol. 32, no. 3, pp. 7–12, Jun. 2020.

Issue

Vol. 32 No. 3 (2015): July - September

Section

Research Articles

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