Oxygen plasma treatment WO3 nanorods for Improvement H2S gas sensing

Chaiyan Oros; Phusit Sangpradub; Preeyanut Daunglaor; Thita Yodsawad

doi:10.55674/jmsae.v13i2.248329

Authors

Chaiyan Oros Faculty of Science and Technology, Rajamangala University of Technology Rattanakosin, Nakornpathom, 73170 Thailand
Phusit Sangpradub Faculty of Liberal-Arts, Rajamangala University of Technology Rattanakosin, Nakornpathom, 73170 Thailand
Preeyanut Daunglaor Faculty of Liberal-Arts, Rajamangala University of Technology Rattanakosin, Nakornpathom, 73170 Thailand
Thita Yodsawad Faculty of Liberal-Arts, Rajamangala University of Technology Rattanakosin, Nakornpathom, 73170 Thailand

DOI:

https://doi.org/10.55674/jmsae.v13i2.248329

Keywords:

WO3 nanorods, Oxygen plasma, H2S sensor, GLAD technique

Abstract

Herein, the oxygen (O₂) plasma has been used to post-treat tungsten oxide (WO₃) nanorods to improve the sensing performance of the H₂S gas sensor. The reactive DC magnetron sputtering process with the glancing-angle deposition (GLAD) technique was used to prepare the WO₃ nanorods. After deposition, the WO₃ nanorod thin films were treated with O₂ plasma at different treatment power from 100 – 200 W. The physical structure of as-deposition and treated WO₃ nanorod thin films was investigated crystal structure and morphology by grazing incident X-ray diffraction (GIXRD), field-emission scanning electron microscope (FE-SEM), and high-resolution transmission electron microscope (HRTEM). The result indicated that the WO₃ nanorod structure transformed to the monoclinic polycrystalline phase. FE-SEM and HRTEM observed slight changes in the shape of the WO₃ nanorods. The H₂S sensing properties were measured at 10 ppm at 150 – 350°C operating temperatures. At an operating temperature of 200 °C, the response to H₂S of O₂ plasma treated WO₃ nanorods is increased by a factor of 5 – 15, and the maximum response to H₂S is 15. The results showed that the O₂ plasma treatment process improved the sensing response of the WO3 nanorods.

Author Biographies

Phusit Sangpradub, Faculty of Liberal-Arts, Rajamangala University of Technology Rattanakosin, Nakornpathom, 73170 Thailand

nano-material and chemical synthesis

Preeyanut Daunglaor, Faculty of Liberal-Arts, Rajamangala University of Technology Rattanakosin, Nakornpathom, 73170 Thailand

chemical synthesis material science

Thita Yodsawad, Faculty of Liberal-Arts, Rajamangala University of Technology Rattanakosin, Nakornpathom, 73170 Thailand

natural product and nanomaterial synthesis

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