Othman, N. A., Nayan, N., Kamarulzaki, M., Azman, Z., Bakar, S. A. ., Mamat, M. ., Mohd Yusop, M. Z. and Ahmade, M. Y. . (2023) “Effects of sputtering pressure on the growth of AlGaN thin films using Co-sputtering technique”, Journal of Materials Science and Applied Energy, 13(1), p. 251506 . doi: 10.55674/jmsae.v13i1.251506.