OTHMAN, N. A.; NAYAN, N.; KAMARULZAKI, M.; AZMAN, Z.; BAKAR, S. A. .; MAMAT, M. .; MOHD YUSOP, M. Z.; AHMADE, M. Y. . Effects of sputtering pressure on the growth of AlGaN thin films using Co-sputtering technique. Journal of Materials Science and Applied Energy, [S. l.], v. 13, n. 1, p. 251506 , 2023. DOI: 10.55674/jmsae.v13i1.251506. Disponível em: https://ph01.tci-thaijo.org/index.php/jmsae_ceae/article/view/251506. Acesso em: 14 may. 2024.