Othman, N. A., Nayan, N., Kamarulzaki, M., Azman, Z., Bakar, S. A. ., Mamat, M. ., Mohd Yusop, M. Z., & Ahmade, M. Y. . (2023). Effects of sputtering pressure on the growth of AlGaN thin films using Co-sputtering technique. Journal of Materials Science and Applied Energy, 13(1), 251506 . https://doi.org/10.55674/jmsae.v13i1.251506